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Inventory of Equipments

※ 문의할 모델을 체크하신 후 견적요청을 눌러주세요.


Model Maker Serial No Process WF Size Vintage Remarks Check
RS-35C KLA 960515 Resitivity 8 1996 Working
Helios Mattson - RTP 12 2005
S-9220 HITACHI 9738-06 CD MEASUREMENT 8 2000 Working/Complete
S-9220 HITACHI - CD MEASUREMENT 8 - Part M/C
S-8840 HITACHI 9116-04 CD MEASUREMENT 8 1999 Working/Complete
S-8840 HITACHI - CD MEASUREMENT 8 - Part M/C
Clean Track MARK-8 TEL 826616 Track 6 1996 1C2D/2 Block / Excellent Condition
RS-35C KLA 960515 Resitivity 8 1995
S-5200+EMI Canceller HITACHI 0632-04 FE SEM 8 2005 Working Condition
FE-VII Rudolph 10848 Ellipsometer 8 -
S-4800+EDX HITACHI 9043-06 FE SEM 8 2008 Working/Horiba EDX
E-1030 HITACHI 0429-001 ION SPUTTER 8 1996 Working Condition
E-1045 HITACHI 0614-07 ION SPUTTER 8 2008 Working Condition
Clean Track ACT-12 TEL E130675 Track 12 2008 1C/2D
Clean Track ACT-12 TEL E140807 Track 12 2004 1C/2D
ALPHA-303I-H TEL L00000215001 H2 ANNEAL 12 2002.01 Quartz Full Set
INDY PLUS TEL S00001055085 PIQ 12 2010 Quartz Full Set
TEL Formula TEL P00000475070 OXIDE 12 2004
TEL Formula TEL P00000285051 NITRIDE 12 2003
TEL ALPHA 8SE TEL M00009995116 NO-GATE 8 1999 Quartz Full Set
TEL ALPHA 8SE TEL M00000175458 HIGH TEMP PYRO 8 2001 Quartz Full Set
Novellus Concept C1 Novellus 580 SIO2/TEOS 8 1992
DJ-853V-8BL KE 1C853G0089 D-POLY 8 1997.09
ALPHA 805 SCN TEL 300009420016 NITRIDE 8 1994.02
ALPHA 808 SC TEL A00009725194 NITRIDE 8 1995.09
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